To create reticle layout data having various scribe widths in accordance with semiconductor chips, and to provide a method for creating reticle layout data and a device for creating reticle layout data.

Scribe widths actually necessary for dicing are set for the reticle layout data of a plurality of types of semiconductor chips. A chip scribe region to be laid around each chip is created to have a half of the set scribe width actually necessary for dicing, with respect to the reticle layout data of the plurality of types of semiconductor chips.