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Title:
METHOD FOR CURING ULTRAVIOLET RAY-CURABLE RESIN, METHOD FOR MANUFACTURING FLAT PANEL AND ULTRAVIOLET RAY IRRADIATING APPARATUS
Document Type and Number:
Japanese Patent JP2007152942
Kind Code:
A
Abstract:

To provide a highly reliable method for curing an ultraviolet rays-curable resin, a method for manufacturing a flat panel utilizing it, and an ultraviolet rays irradiating apparatus which is useful for practicing these methods, is inexpensive, exhibits low consumption of electric power, has a long lifetime and is miniaturized.

The method for curing holds oxygen concentration on the resin surface at 5 Vol.% or lower when the ultraviolet rays-curable resin is irradiated with ultraviolet rays from a light emitting diode. The apparatus is composed of a supporting tool for supporting a body to be processed, a means for irradiating with the ultraviolet rays from the light emitting diode, and a means capable of controlling the oxygen concentration on the surface of the body to be processed by feeding an inert gas around the body to be processed.


Inventors:
IMAZAWA KATSUYUKI
KASHIWAGI TSUTOMU
Application Number:
JP2006305388A
Publication Date:
June 21, 2007
Filing Date:
November 10, 2006
Export Citation:
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Assignee:
SHINETSU CHEMICAL CO
International Classes:
B29C35/08; H01L21/56; B29L31/34
Attorney, Agent or Firm:
Shuji Iwamiya