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Title:
METHOD FOR DECOMPOSING LOW MOLECULAR SILOXANE, FILTER, FIBER, NONWOVEN FABRIC, FLUORORESIN SHEET FOR SPLITTING AND THEIR PRODUCTION
Document Type and Number:
Japanese Patent JPH10202063
Kind Code:
A
Abstract:

To produce a filter ensuring a small pressure drop, having satisfactory gas decomposing function, generating no contaminant from the filter itself and suitable for use as a filter for a clean room for producing a semiconductor, pharmaceuticals, food, etc., and to decompose low molecular siloxane with the filter.

Both sides of an unfired sheet of fluororesin such as polytetrafluoroethylene(PTFE) are coated with a dispersion of fluororesin contg. functional fine powder and plural such coated sheets are laminated, fired in one body and mechanically split by means of a brush with metallic needles to obtain short fluororesin fibers. These fibers are formed into a web by means of a carding machine, etc., the web is intertwisted with a jet of water and the resultant nonwoven fabric sheet is formed into the objective filter. The central layer 1 of each of the fibers is made, e.g. of PTFE resin and the surface layer 2, 2' is made, e.g. of PTFE resin mixed with photocatalytic anatase type TiO2 powder.


Inventors:
IIMURA MITSUO
SATO KENJI
DOMOTO TADANORI
Application Number:
JP1384097A
Publication Date:
August 04, 1998
Filing Date:
January 28, 1997
Export Citation:
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Assignee:
NITTO DENKO CORP
International Classes:
B01D71/36; B01D39/00; B01D39/14; B01D53/86; B32B5/02; B32B27/30; H01L31/08; (IPC1-7): B01D53/86; B01D39/00; B01D39/14; B01D71/36; B32B5/02; B32B27/30; H01L31/08
Attorney, Agent or Firm:
Hiroyuki Ikeuchi (1 person outside)