Title:
METHOD FOR DEHYDRATING QUARTZ POWDER
Document Type and Number:
Japanese Patent JP3304131
Kind Code:
B2
Abstract:
PURPOSE: To provide a method for effectively dehydrating quartz powder.
CONSTITUTION: Quartz powder is dehydrated by bringing it into contact with gaseous chlorine or a gaseous chlorine-contg. compd. and it is preferably dehydrated in a fluidized state by introducing a fluidizing gas contg. 0.1-10% gaseous chlorine or gaseous chlorine-contg. compd. into the powder at 1,000-1,500°C. By such a method, a higher dehydrating effect than the conventional effect can be attained at a lower temp. than the conventional temp. in a shorter time. A quartz crucible produced with the dehydrated quartz powder as starting material has high strength at high temp. and a very low bubble content because of its low OH group content. When the quartz crucible is used, the exfoliation of the inner wall is not caused at the time of pulling up a silicon single crystal and high-quality single crystalline silicon having high rate of single crystallization and almost free from impurities can be obtd.
Inventors:
Yoshiyuki Tsuji
Etsuji Kimura
Etsuji Kimura
Application Number:
JP21559092A
Publication Date:
July 22, 2002
Filing Date:
July 21, 1992
Export Citation:
Assignee:
Japan Super Quartz Co., Ltd.
Mitsubishi Materials Corporation
Mitsubishi Materials Corporation
International Classes:
C01B33/00; C01B33/18; C03C1/02; C30B15/00; C30B15/10; (IPC1-7): C01B33/18
Domestic Patent References:
| JP4154613A | ||||
| JP55167143A | ||||
| JP56100145A | ||||
| JP2289416A | ||||
| JP483711A | ||||
| JP4223036B1 |
Attorney, Agent or Firm:
Hiroshi Chiba
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