Title:
ＢｘＮｙＣｚＯｗ膜の成膜方法、磁気記録媒体およびその製造方法
Document Type and Number:
Japanese Patent JP7129083
Kind Code:
B2
Abstract:
[Problem] To provide a BxNyCzOw film having a surface having a water contact angle of 50 ° or less. [Solution] One embodiment of the present invention is a BxNyCzOw film formed on a substrate, wherein x, y, z, and w in the BxNyCzOw film satisfy equations (1)-(5) below. (1) 0.4 < x < 0.6 (2) 0.4 < y < 0.6 (3) 0 ≤ z < 0.1 (4) 0 ≤ w < 0.1 (5) x + y + z + w = 1
Inventors:
Koji Abe
Toshiyuki Watanabe
Hiroyasu Sekino
Toshiyuki Watanabe
Hiroyasu Sekino
Application Number:
JP2018513045A
Publication Date:
September 01, 2022
Filing Date:
February 28, 2017
Export Citation:
Assignee:
Japan Create Co., Ltd.
International Classes:
G11B5/72; C23C16/30; C23C16/40; G11B5/725; G11B5/84
Domestic Patent References:
| JP10198944A | ||||
| JP5062169A | ||||
| JP2015004085A |
Attorney, Agent or Firm:
Tetsuo Tachibana
Masaki Fujimoto
Masaki Fujimoto
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