Title:
METHOD OF DEPOSITING BOROSILICATE CONTAINING COAT WITH ELECTRONIC BOARD
Document Type and Number:
Japanese Patent JP3251761
Kind Code:
B2
Abstract:
PURPOSE: To make it possible to form a borosilicate containing-flattened coat which is useful as a protection coat or a dielectric layer by applying a borosilazane polymer-containing coat to an electronic board and heating with a specific temperature in an oxidizing atmosphere.
CONSTITUTION: A preceramic coat is formed by applying a hydrosilazane polymer, which is obtained by reacting the polymer with a brane complex or diborane, to a board with a solution which includes a solvent. Then, the preceramic coat is heated under an oxidizing atmosphere which promotes changes to the borosilicate of the borodiborane. The air, the moisture, oxygen plasma ammonia, amine and their mixtures are used in the oxidizing atmosphere. The borosilazane is exposed to the temperature ranging from 20 to 1000°C or more favorably ranging from 50 to 800°C, responding to the reactive atmosphere, which forms the borosilicate containing-flattened coat having an excellent depositing power on the board.
Inventors:
Greek Chandra
Lauren Andrew Halska
Greg Alan Zank
Lauren Andrew Halska
Greg Alan Zank
Application Number:
JP5357894A
Publication Date:
January 28, 2002
Filing Date:
March 24, 1994
Export Citation:
Assignee:
DOW CORNING CORPORATION
International Classes:
C08G79/08; C04B41/50; C08G79/00; H01L21/312; H01L21/314; H01L21/316; H01L23/29; H05K1/03; H05K3/28; (IPC1-7): H01L21/316; H01L21/312
Other References:
【文献】特許2920159(JP,B2)
Attorney, Agent or Firm:
Takashi Ishida (3 others)