Title:
電解溶液と検査対象物の欠陥部検出方法
Document Type and Number:
Japanese Patent JP4200151
Kind Code:
B2
Inventors:
Yuya Shintani
Application Number:
JP2005201465A
Publication Date:
December 24, 2008
Filing Date:
July 11, 2005
Export Citation:
Assignee:
Japan Aviation Electronics Industry Co., Ltd.
International Classes:
G01N27/26; G01N21/894
Domestic Patent References:
| JP63044158A | ||||
| JP60216253A | ||||
| JP2004301605A |
Attorney, Agent or Firm:
Kenho Ikeda
Shuichi Fukuda
Keisuke Yamamoto
Shuichi Fukuda
Keisuke Yamamoto