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Title:
METHOD FOR DETECTING LIFETIME OF SLAB, AND SYSTEM THEREFOR
Document Type and Number:
Japanese Patent JP2007092171
Kind Code:
A
Abstract:

To provide a system and a method for detecting a lifetime of a slab target used by a process tool.

At least one detector is placed in the slab target. A determination is made as to whether a value of a signal generated by a detector associated with at least one indicator during operation of the process tool is equal to a warning setting value, or is above the alarm setting value. A first warning is provided if the value of the signal is equal to the warning setting value or between the warning setting value and the alarm setting value. A second warning is provided if the value of the signal is between the warning setting value and the alarm setting value. An alarm is provided if the value of the signal is equal to the alarm setting value or above the alarm setting value, the alarm indicating that the slab target of consumable material is approaching the predetermined quantity or has been reduced to the predetermined quantity.


Inventors:
HSIAO YI-LI
YU CHEN-HUA
O SEIYO
KYO TEISHO
Application Number:
JP2006217327A
Publication Date:
April 12, 2007
Filing Date:
August 09, 2006
Export Citation:
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Assignee:
TAIWAN SEMICONDUCTOR MFG
International Classes:
C23C14/34; H01L21/285
Domestic Patent References:
JP2003099114A2003-04-04
JPS63169377A1988-07-13
JP2004299134A2004-10-28
JPH08176808A1996-07-09
Attorney, Agent or Firm:
Mamoru Ushiki
Shimizu Sakaematsu
Kuniaki Toyama
Masayoshi Yoshida



 
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