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Patent Searching and Data


Title:
METHOD FOR DETECTING RECESSED PART OF MATERIAL UNDER INSPECTION
Document Type and Number:
Japanese Patent JPH0518906
Kind Code:
A
Abstract:

PURPOSE: To obtain a recess detecting method which can automatically detect the recessed part in the upper surface of a material under inspection positively.

CONSTITUTION: The upper surface of a lead pattern 11 is lit with a lighting device 12 which emits luminous flux at the depression angle of about 30° with respect to the above described upper surface. The image of the reflected light from the lead pattern 11 in the lighting region of the lighting device 12 is picked up with an image sensing camera 15. The picked-up image is processed with an A-D converter 17, a first comparator circuit 20, a second comparator circuit 22 and image operating circuits 23 and 24. Thus, the presence or absence of the recessed, part in the upper surface of the lead pattern 11 is automatically judged.


Inventors:
OKUYAMA TAKASHI
Application Number:
JP19893691A
Publication Date:
January 26, 1993
Filing Date:
July 12, 1991
Export Citation:
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Assignee:
ASAHI OPTICAL CO LTD
International Classes:
G01B11/30; G01N21/88; G01N21/89; G01N21/892; G06T1/00; H01L21/60; (IPC1-7): G01B11/30; G01N21/88; G01N21/89; G06F15/62; H01L21/60
Attorney, Agent or Firm:
Shigeru Noda