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Title:
METHOD FOR DETECTING ROTATIONAL DEVIATION AND ROTATIONAL DEVIATION DETECTOR
Document Type and Number:
Japanese Patent JPH11110554
Kind Code:
A
Abstract:

To provide a rotational deviation detector, capable of reducing the number of templates and similarity calculation.

A control part 40 of the rotational deviation detector is provided with a template part 48 for generating and holding the template for each plural angle points from a reference mark, obtained by picking up a regular subject to be checked on receiving an instruction from an input part 50, an image processing part 42 to process a detection mark of the subject to be checked obtained by picking up the subject to be checked at an image-pickup part 30, a similarity processing part 44 to be superposed on the detection mark of the image processing part 42, by using at least three templates of the template part 48 and to calculate similarity at every angle point respectively on receiving the instruction by the input part 50 and an angle determining part 46 provided with a functional vertex method 20 for calculating a coordinate X0 at the vertex of a function curve (X, Y) to link points of respective coordinates obtained by defining the similarity as a Y-coordinate and the angle point corresponding to the similarity as an X-coordinate from the calculation and to determine a value of the coordinate X0 as an angle value of rotational deviation of the subject to be checked.


Inventors:
OZAWA TETSUO
ASAI TAKESHI
NISHI HIROISA
Application Number:
JP26893197A
Publication Date:
April 23, 1999
Filing Date:
October 01, 1997
Export Citation:
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Assignee:
HITACHI ENG CO LTD
International Classes:
G01B11/26; G06T1/00; G06T7/00; (IPC1-7): G06T7/00; G01B11/26
Attorney, Agent or Firm:
Yukihiko Takada (1 outside)