To improve the reliability of measurement of residual bead and to prevent the occurrence of trouble caused by defective trimming by using a diffusibility improving roller and transferring the ruggedness onto the trimming surface having high specular property.
Just after cutting a welded part by the cutting tool 4a of a trimmer 4, the roller surface of the diffusibility improving roller 20 is pushed onto the trimming surface to transfer the ruggedness of the roller surface onto the trimming surface, thereby subjecting the trimming surface to mat finishing. The specular property of the trimming surface is mitigated and the diffusibility of light is improved. By this method, since receiving light quantity from the trimming surface detected by two-dimensional range finders 5, 6 is stabilized, the distance to the trimming surface can stably be measured. Thus, the measurement of the residual bead is stabilized.
| JP2007504444 | Transmissive and reflective spatial heterodyne interferometry (SHIRT) measurements |
| JPH1052716 | COILING DEVICE |
| WO/2021/154617 | OVERLAY METROLOGY ON BONDED WAFERS |
OKAMOTO KAIZO
MURAKAMI AKIRA
