To improve quality of images acquired with a low irradiation amount.
This particle-optical apparatus comprises a particle source 101, an object plane on which an object 111 to be imaged is provided, a condenser system 104 for illuminating the object plane, a projection system 106 for forming an image of the object plane by imaging particles transmitted through the object, and a detector 150 for detecting the image. The detector comprises a semiconductor sensor having an array of pixels. The array of pixels provides a plurality of pixel signals from respective corresponding pixels of the array in response to the particles made incident on the detector. This method comprises a procedure of receiving the plurality of pixel signals, and a procedure of determining a reconstructed image using Viterbi Detection on the plurality of pixel signals. The Viterbi Detection uses a plurality of different states corresponding to a plurality of distribution of the plurality of particles made incident on the detector, and at least two states corresponding to same non-zero multiplicity of the particles made incident on a single pixel of the plurality of pixel signals.
| JP2010073695A | 2010-04-02 |
Tadahiko Ito
Shinsuke Onuki