Title:
シリカガラスルツボの赤外吸収スペクトルの三次元分布の決定方法、シリコン単結晶の製造方法
Document Type and Number:
Japanese Patent JP5923644
Kind Code:
B2
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Inventors:
Toshiaki Sudo
Tadahiro Sato
Ken Kitahara
Makoko Kodama
Tadahiro Sato
Ken Kitahara
Makoko Kodama
Application Number:
JP2015097793A
Publication Date:
May 24, 2016
Filing Date:
May 13, 2015
Export Citation:
Assignee:
Sumco inc.
International Classes:
G01B11/24; C30B15/10; C30B29/06; G01C3/06
Domestic Patent References:
| JP2003106995A | ||||
| JP2006096618A | ||||
| JP2009002823A | ||||
| JP3092712A | ||||
| JP2000016820A | ||||
| JP2010030884A | ||||
| JP11171571A | ||||
| JP8208376A | ||||
| JP2005345383A |
Foreign References:
| WO2011158869A1 |
Attorney, Agent or Firm:
Ichiro Nomura