Title:
METHOD AND DEVICE FOR CALCULATING LIGHT QUANTITY DISTRIBUTION, RECORDING MEDIUM RECORDING PROGRAM FOR CALCULATING LIGHT QUANTITY DISTRIBUTION, AND METHOD AND DEVICE FOR EXPOSURE
Document Type and Number:
Japanese Patent JP2014130971
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To efficiently and highly accurately calculate light quantity distribution information on a pupil surface of a projection optical system of diffraction light generated from a pattern.SOLUTION: A method for calculating light quantity distribution information on a projection pupil surface of light from a pattern formed on a predetermined surface with a thin film having a plurality of layers with mutually different complex diffraction indexes includes: a step 116 for inputting information on an illumination pupil which illuminates the pattern; steps 124, 126 for sequentially calculating at least one of the transmissivity and the reflectivity when a light flux from portion of the illumination pupil passes through a boundary surface of the plurality of layers in the pattern, and calculating a first complex amplitude distribution on a virtual surface of the light flux after passing through the pattern; and a step 128 for calculating a second complex amplitude distribution on the projection pupil surface by performing Fourier transformation of the first complex amplitude distribution.
Inventors:
FUJII KOICHI
IMAI MOTOMASA
IMAI MOTOMASA
Application Number:
JP2012289127A
Publication Date:
July 10, 2014
Filing Date:
December 28, 2012
Export Citation:
Assignee:
NIKON CORP
International Classes:
H01L21/027; G02B13/00; G03F7/20
Attorney, Agent or Firm:
Satoshi Omori
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