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Title:
METHOD AND DEVICE FOR CARRYING AND POSITIONING BELT-LIKE WORK
Document Type and Number:
Japanese Patent JP3307295
Kind Code:
B2
Abstract:

PROBLEM TO BE SOLVED: To prevent the positional deviation of belt-like work in a carrying direction and to accurately carry and position the belt-like work even though there are plural kinds of carrying pitches.
SOLUTION: The belt-like work W is moved by a specified amount corresponding to the pitch PwW1 of a pattern area and stopped, a light irradiation part LH irradiates the alignment mark MAM of a mask M, and the positional deviation δ1 between a mask alignment mark image and a work alignment mark is stored. The work W is moved by the specified amount corresponding to the pitch PW2 and stopped, and the positional deviation δ2 is similarly stored. Next, when the belt-like work is moved by the specified amount corresponding to the pitch PW1, the specified amount is corrected by the positional deviation δ1 and the belt-like work is moved. Next, when the belt-like work is moved by the specified amount corresponding to the pitch PW2, the specified amount is corrected by the positional deviation δ2 and the belt-like work is moved.


Inventors:
Atsushi Homma
Application Number:
JP26344697A
Publication Date:
July 24, 2002
Filing Date:
September 29, 1997
Export Citation:
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Assignee:
Ushio, Inc.
International Classes:
G03F9/00; H01L21/027; H01L21/677; H05K3/20; C23F1/00; H01L21/68; (IPC1-7): G03F9/00
Domestic Patent References:
JP8171217A
JP11102033A
JP8122838A
JP1120248A
JP4147147A
JP4299332A
JP588380A
Attorney, Agent or Firm:
Shunichiro Nagasawa