METHOD AND DEVICE FOR DECREASING TEMPERATURE SLOPE INSIDE SUBSTRATE SUPPORT BASE

Japanese Patent JP2001057370

A

To reliably control temperatures in a ceramic base to be heated by a resistance heater by a method wherein there is arranged a heater controller for restricting a heater controller providing a power amount and a current applied on one or more coils of the resistance heater of the ceramic base.

An assembly 100 of a base has a resistance heater 112, which has a metal coating layer of a resistance material composed of tungsten, etc., for heating one or more coils or one or more assemblies 100. When a current is applied on the heater 112, a peculiar resistor of the heater generates heat to heat a wafer 116 supported by a ceramic base 102 enclosing the heater 112 sequentially. A temperature controller 104 monitors temperatures of the base 102 by use of a thermocouple 118, and one or more thermocouple signals T1 are transmitted to the temperature controller 104 via a connection line 120. A control signal S1 is generated by the temperature controller 104 corresponding to the thermocouple signals T1.

WO/2004/100610	HEATING DEVICE
JPS59184489	[Title of the device] The temperature control circuit of a field-like heating element
JP5548927	In low-temperature environment, they are an electronic device which can be started, and its starting method.

BURKHART VINCENT E
STEVEN SANSOONI
SUGARMAN MICHAEL N
TOO CHAN

JP2000107353A

February 27, 2001

March 03, 2000

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APPLIED MATERIALS INC

H05B3/00; F27D11/02; F27D19/00; G05D23/19; G05F1/455; H01L21/00; H01L21/324; (IPC1-7): H01L21/324; F27D11/02; F27D19/00; G05D23/19; G05F1/455; H05B3/00

Minoru Nakamura (9 outside)

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