METHOD AND DEVICE FOR DETECTING ORIFICE CLOGGING IN PRESSURE-TYPE FLOW RATE CONTROLLER

Japanese Patent JP3546153

B

PROBLEM TO BE SOLVED: To judge clogging with simple operation without disassembling piping by comparing reference pressure attenuation data when an orifice is not clogged with pressure attenuation data at the time of an actual operation and judging the propriety of clogging according to whether or not they are dissociated for not less than a prescribed degree.
SOLUTION: A setting flow rate is held to a high setting flow rate. The high setting flow rate is switched to a low setting flow rate and it is kept. Upper stream side pressure is measured and pressure attenuation data is obtained. Reference pressure attenuation data measured when an orifice is not clogged and pressure attenuation data obtained by measurement are compared with same conditions. When pressure attenuation data is dissociated from reference pressure attenuation data for not less than a prescribed degree, clogging is reported. The clogging detector is constituted of a central processing unit CPU, a memory device for data storage M, a communication part PT 42 with outside, the outer circuit 4 of a trigger circuit, an alarm circuit 46 at the time of clogging, a power source circuit SC 48 and the outer power source 50 of ±15 V, for example.

Omi, Tadahiro
Iida, Seiichi
Kagatsume, Satoru
Hirose, Jun
Uno, Tomio
Nishino, Koji
Ikeda, Shinichi
Yamaji, Michio
Doi, Ryosuke
Ideta, Eiji
Hirose, Takashi
Yoshikawa, Kazuhiro
Kogai, Mutsunori

JP1999000213633

April 16, 2004

July 28, 1999

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Omi, Tadahiro
TOKYO ELECTRON LTD
FUJIKIN INC

G01F1/42; G05D7/06; G05D16/20; G01F1/34; G05D7/06; G05D16/20; (IPC1-7): G05D7/06; G01F1/42; G05D16/20

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