Title:
METHOD AND DEVICE FOR DETECTING POSITION
Document Type and Number:
Japanese Patent JP3450645
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To detect position with stabilized precision even when one period length as a basic waveform for signal processing is not known precisely, by generating a periodic pattern signal as well as adjusting the processing width of an orthogonal transformation, calculating the phase of the periodic pattern signal, and obtaining the position on the basis of the phase.
SOLUTION: A periodic pattern signal is generated by a means 11 for generating periodic pattern signal, according to the position of a mark M for positioning formed on a wafer W, and an orthogonal transformation width is adjusted by a means 12 for adjusting processing width of the orthogonal transformation. Further, one-dimensional discrete signal string with periodicity outputted from the means 11 is subjected to an orthogonal transformation through an orthogonal transformation means 13, and the phase of periodic pattern signal is calculated by using values in such a frequency space domain by means of a phase calculation means 14. The calculated phase is obtained by a phase calculation means 15 so as to covert it into a quantity of positional deviation, that is, a positioning mark M position.
Inventors:
Shinichiro Koga
Application Number:
JP10520897A
Publication Date:
September 29, 2003
Filing Date:
April 07, 1997
Export Citation:
Assignee:
Canon Inc
International Classes:
G01B11/00; G03F9/00; H01L21/027; H01L21/68; (IPC1-7): H01L21/027; G01B11/00; G03F9/00; H01L21/68
Domestic Patent References:
| JP5343291A | ||||
| JP9160261A |
Attorney, Agent or Firm:
Yukio Takanashi
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