METHOD AND DEVICE FOR DISCRIMINATING PATTERN KIND

Title:

METHOD AND DEVICE FOR DISCRIMINATING PATTERN KIND

Document Type and Number:

Japanese Patent JPH10232486

Kind Code:

A

Abstract:

To provide method and device for discriminating a pattern kind such as a Levenson type phase shift mask, etc., based on signal information of respective beforehand measured patterns.

A reference standard mask is irradiated by spot light, and the scattered light or the positive reflection light of the spot light is detected, and the signal information 25, 26, 27, 28, 29 of the components classification of the pattern of the standard mask are gained by learning beforehand. Then, the mask of a measuring object is irradiated by the spot light, and the scattered light or the positive reflection light of the spot light is detected, and the components of the patterns of the mask of the measuring object are discriminated based on the signal information gained by learning.

Inventors:

MATSUBARA EIJI

Application Number:

JP3801497A

Publication Date:

September 02, 1998

Filing Date:

February 21, 1997

Export Citation:

Click for automatic bibliography generation Help

Assignee:

NIKON CORP

International Classes:

G01N21/88; G01N21/93; G01N21/956; G03F1/30; G03F1/38; H01L21/027; H01L21/66; (IPC1-7): G03F1/08; G01N21/88; H01L21/027; H01L21/66

Attorney, Agent or Firm:

Fuyuki Nagai

Previous Patent: RETICLE

Next Patent: ORIGINAL PLATE OF PHOTOSENSITIVE PLANOGRAPHIC PRINTING PLATE