To provide a drying method of a cleaned object capable of quickly and surely performing drying processing even to the thin and light cleaned object of small heat storage quantity.

A heat conductor 5 in which liquid 6 having heat conductivity is sealed, is heated. The cleaned object 2 to be dried is brought into contact with the heated heat conductor 5, so that the cleaned object 2 is dried by conducting the heat of the heat conductor 5 to the cleaned object 2.