Title:
METHOD AND DEVICE FOR EVALUATING THIN FILM
Document Type and Number:
Japanese Patent JPH08320286
Kind Code:
A
Abstract:
PURPOSE: To generate the corrosion similar to field test, and accelerate the field test in a short time.
CONSTITUTION: A stirring plate 5 for stirring the corrosive gas generated from a corrosive gas supplying solution 2 and a thin film 4 stuck to a slide glass are set within a testing tank 1, the corroded state similar to field test is formed, and the same corrosion as the field test is generated in the thin film 4 within a short time to estimate the storage life of the thin film 4.
Inventors:
OHATA HISAYO
HIBINO KUNIO
HIBINO KUNIO
Application Number:
JP12613195A
Publication Date:
December 03, 1996
Filing Date:
May 25, 1995
Export Citation:
Assignee:
MATSUSHITA ELECTRIC IND CO LTD
International Classes:
G01N17/00; (IPC1-7): G01N17/00
Attorney, Agent or Firm:
Awano Shigetaka