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Title:
METHOD AND DEVICE FOR FINE PROCESSING
Document Type and Number:
Japanese Patent JP2000079636
Kind Code:
A
Abstract:

To form a fine processing pattern surface on the surface of a sheet- shaped resin plate.

In a box type member 1, a press plate 2, a resin plate 3, and a transfer plate 4 are laminated, and a lid member 5 is fixed, and a some free space 7 is formed, and heated by using a heating furnace. The box type member 1 expands with the increase of temperature corresponding to the coefficient of thermal expansion of each member. Since the coefficient of thermal expansion of the PTFE resin of the press plate 2 is greater than that of the member 1, the free space 7 is narrowed by heating, with the reduction of the clearance of the free space 7, the resin plate 3 having a lower heat deflection temperature than the press plate 2 and the transfer plate 4 is softened, the free space 7 is eliminated, and a fine processing pattern surface 4a is inverted and transferred on the surface of the resin plate 3.


Inventors:
TAKEUCHI KAZUTAKA
TANAKA YASUHIRO
MAEKAWA ICHIRO
Application Number:
JP12130199A
Publication Date:
March 21, 2000
Filing Date:
April 28, 1999
Export Citation:
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Assignee:
CANON KK
International Classes:
B29C43/02; B29C59/02; B29D11/00; G02B3/00; (IPC1-7): B29C59/02; G02B3/00
Attorney, Agent or Firm:
Hibiya Masahiko



 
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