Title:
METHOD AND DEVICE FOR GAS-DEPOSITING SUPERFINE PARTICLE
Document Type and Number:
Japanese Patent JP3429014
Kind Code:
B2
Abstract:
PURPOSE: To form a uniform film of superfine particles on a substrate at the time of introducing the superfine particles of metal into the film forming chamber in the form of aerosol to form the thin film of superfine particles on the substrate by transiently storing the aerosol in a storage chamber and controlling the supply based on the concn.
CONSTITUTION: A basket-shaped filament 5 made of W contg. Au 4 is energized in an evacuated superfine particle forming chamber 1 to melt and vaporize the Au 4, gaseous He is supplied from a cylinder 14 and mixed with the vaporized superfine particle of Au, and the mixture as the aerosol is sent to an evacuated aerosol storage chamber 2 through a transport pipe 15. The superfine Au particles are settled in the chamber 2 by gravity to form a concn. distribution increasing downward, the concn. of the aerosol is detected by the He-Ne laser beam emitter 28 and detector 30, the tip 36a in the chamber 2 of a transport pipe 18 leading to a film forming chamber 3 is vertically moved in accordance with the result to supply the aerosol of constant concn. into the chamber 3, and the uniform deposited layer of superfine Au particles is formed on the surface of the substrate 20 which is horizontally moved.
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Inventors:
Chikara Hayashi
Seiichiro Kashu
Seiichiro Kashu
Application Number:
JP30462892A
Publication Date:
July 22, 2003
Filing Date:
October 16, 1992
Export Citation:
Assignee:
Vacuum Metallurgy Co., Ltd.
International Classes:
B01J2/00; C23C14/22; C23C14/24; C23C14/54; (IPC1-7): C23C14/22; B01J2/00; C23C14/24; C23C14/54
Domestic Patent References:
| JP222102A | ||||
| JP270058A | ||||
| JP2302305A |
Attorney, Agent or Firm:
Yasuo Iisaka