Title:
METHOD AND DEVICE FOR GAS FLOW MEASUREMENT
Document Type and Number:
Japanese Patent JP2008089575
Kind Code:
A
Abstract:
To provide a method and a device for gas flow measurement.
In one embodiment, by using a calibration circuit for gas control, in particular, verification and/or calibration of the gas flow utilizedin back-side cooling, distribution for processing gas, distribution for purge gas, distribution for cleaning agent, distribution for carrier gas, and distribution for repair gas are performed.
Inventors:
Lee, Jared Ahmad
Gold, Ezra Robert
Zhang, Chunlei
Cruse, James Patrick
Fovell, Richard Charles
Gold, Ezra Robert
Zhang, Chunlei
Cruse, James Patrick
Fovell, Richard Charles
Application Number:
JP2007000210558
Publication Date:
April 17, 2008
Filing Date:
August 11, 2007
Export Citation:
Assignee:
APPLIED MATERIALS INC
International Classes:
G01F25/00; C23C14/54; C23C16/44; H01L21/205; H01L21/3065; G01F25/00; C23C14/54; C23C16/44; H01L21/02