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Title:
METHOD AND DEVICE FOR HARDENING METAL OXIDE FILM
Document Type and Number:
Japanese Patent JP2013194250
Kind Code:
A
Abstract:

To effectively harden a metal oxide film formed on a resin plate surface, and to use resin as a window material of a transport machine.

A method for hardening a metal oxide film includes a first step for forming a metal oxide film MO containing at least one metal selected from aluminum, titanium, zirconium, niobium and hafnium on a surface of a resin plate S, and a second step for intermittently irradiating an oxygen ion to the metal oxide film MO by an ion gun 3 in a treatment chamber 10 under reduced pressure. The method also includes a third step for exposing the metal oxide film MO to a plasma atmosphere P of inert gas in the treatment chamber 10 under the reduced pressure while the oxygen ion is not irradiated.


Inventors:
TAKEI HIDEO
SATO MUNEYUKI
MOMONO TAKESHI
YOSHIOKA DAISUKE
OKAZAKI SOHEI
SHICHI TETSUYA
Application Number:
JP2012000059457
Publication Date:
September 30, 2013
Filing Date:
March 15, 2012
Export Citation:
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Assignee:
ULVAC CORP
TOKAI RYOKAKU TETSUDO KK
International Classes:
C23C14/58; B05C9/12; B05D3/04; B05D7/24; C01B13/14; C23C14/06; G02B1/10; G02B1/14
Domestic Patent References:
JPH05247658A1993-09-24
JPH08108066A1996-04-30
JP2004002094A2004-01-08
JPH05247658A1993-09-24
JPH08108066A1996-04-30
JP2004002094A2004-01-08
Foreign References:
WO2010038894A12010-04-08
Attorney, Agent or Firm:
特許業務法人青莪