Title:
METHOD AND DEVICE FOR INSPECTION
Document Type and Number:
Japanese Patent JPS6354673
Kind Code:
A
Abstract:
PURPOSE:To enable a simple and general inspection in a low cost by previously compressing the picture data in multiple gradation of an object to be inspected as a reference in a specified algorithm to record and comparing the picture obtained by restoring the above-mentioned data with the picture of the object to be inspected so as to detect the defect of the object to be inspected. CONSTITUTION:Before an inspection, a picture detection part 1 detects the picture data of the object to be inspected 1b as the reference, which is compressed in a data compressing part 2 in the specified algorithm to be recorded in a data storage part 3. And at the time of inspection the picture of the object to be inspected 1b obtained from the picture detection part 1 is compared with the picture of the object to be inspected 1b obtained by restoring the data compressed to be stored in the data storage part 3 through a data expansion part 4 as the reference in a defect decision part 5. Thus the presence of the defect in the object to be inspected 1b such as a reticle, etc. can be discriminated. Thus, the inspection system can be constructed in a low cost because it is not necessary to treat extensive data in such a case, for example, as using the design data of the pattern formed in the object to be inspected 1b.
Inventors:
TANIGUCHI YUZO
KAWASHIMA HIDEAKI
KAWASHIMA HIDEAKI
Application Number:
JP19713686A
Publication Date:
March 09, 1988
Filing Date:
August 25, 1986
Export Citation:
Assignee:
HITACHI LTD
International Classes:
G01N21/88; G01N21/93; G03F1/84; G06T1/00; H01L21/30; H01L21/66; (IPC1-7): G01N21/88; G06F15/62; H01L21/30; H01L21/66
Attorney, Agent or Firm:
Katsuo Ogawa