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Title:
METHOD AND DEVICE FOR MAGNETISM MEASUREMENT
Document Type and Number:
Japanese Patent JPH0926471
Kind Code:
A
Abstract:

To provide a novel method and a device for magnetism measurement capable of accurately determining an absolute value of magnetization without calibrating the device.

Relative values of a direction and a magnitude of a magnetization (vector quantity) of a specimen (magnetic thin film) 5 is detected in accordance with deflection 6 of an electron beam 4 by virtue of Lorentz force. Phase variation between divided two electron beams 4 that is generated by the two electron beams penetrating through the specimen 5 is detected so that the variation of the magnetic flux penetrating a face formed by the two electron beams 4 is measured by unit of h/e (h:Plank's constant, e: elementary charge). A magnitude (absolute value) of magnetic flux density is determined by assuming that the measured result is equal to the variation of the magnetic flux obtained from relative values of detected direction and magnitude. In general, it is adopted to the measurement of the magnetic flex density in the existence of magnetization and magnetic field.


Inventors:
YAJIMA YUSUKE
TAKAHASHI YOSHIO
SUZUKI HIROSHI
KURODA KATSUHIRO
Application Number:
JP17475695A
Publication Date:
January 28, 1997
Filing Date:
July 11, 1995
Export Citation:
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Assignee:
HITACHI LTD
International Classes:
G01R33/02; G01R33/12; H01J37/26; (IPC1-7): G01R33/02; G01R33/12; H01J37/26
Attorney, Agent or Firm:
Toshiyuki Usuda