METHOD AND DEVICE FOR MANUFACTURING GAS CONTAINING METAL PARTICLES, AND METHOD AND DEVICE FOR EVALUATING PARTICLE MEASURING INSTRUMENT AND PARTICLE COLLECTOR

Title:

METHOD AND DEVICE FOR MANUFACTURING GAS CONTAINING METAL PARTICLES, AND METHOD AND DEVICE FOR EVALUATING PARTICLE MEASURING INSTRUMENT AND PARTICLE COLLECTOR

Document Type and Number:

Japanese Patent JP2002301360

Kind Code:

A

Abstract:

To provide a manufacturing method for a gas containing metal particles by which the metal particles close to reality is extremely easily generated and to provide a device with which a particle measuring instrument and a particle collector under conditions close to the reality are evaluated by using the gas containing the metal particles manufactured by the method.

While a carrier gas is made to flow inside a hollow metal pipe by adjusting a pressure and a flow rate, a heating amount is adjusted and heating is performed. As a result, the metal particles are volatilized in the carrier gas and the gas containing the metal particles of a desired particle diameter and a desired density is manufactured. By using the gas, the particle measuring instrument and the particle collector are evaluated.

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Inventors:

SAKATA SUSUMU
KIMIJIMA TETSUYA
KIMURA YUTAKA

Application Number:

JP2001110566A

Publication Date:

October 15, 2002

Filing Date:

April 09, 2001

Export Citation:

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Assignee:

NIPPON OXYGEN CO LTD

International Classes:

B01J19/00; G01N15/02; G01N15/06; G01N15/14; G01N1/28; (IPC1-7): B01J19/00; G01N15/02; G01N15/06

Attorney, Agent or Firm:

Kido Kazuhiko

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