To provide a method and device of manufacturing a microstructure, capable of reducing the frequency of remachining an electrode and shortening a total machining time without worsening the machining precision of a machined shape.

A device of manufacturing a microstructure comprises a machining tank 108 storing a discharge machining liquid 107 in which a workpiece 106 is immerged, an electrode 105 to be relatively moved to the workpiece 106 for discharge machining the workpiece 106, and a machining power supply 140 for giving predetermined discharge energy between the electrode 105 and the workpiece 106. The electrode 105 is formed of cemented carbide and the workpiece 106 is of brass The machining power supply 140 is used to output discharge energy so that the consumption rate of the electrode 105 may be 0.1% of less.