PURPOSE: To simplify a manufacturing process by a method wherein, in a manufacture of a thin base sheet, e.g. crystal, silicon, the end surface of an ingot is ground in a flat manner and the end surface side is cut to a thin piece with a given thickness, and the thin piece is mounted to a chuck to grind a cut surface.

CONSTITUTION: The end surface of an ingot 22 supported by a support means 20 is ground through rotation of a grinding stone 43 by moving slide 3 and a moving table 7, and is then cut to a thin piece 25 by means of a blade 13 of a thin base sheet cutting means 10. A thin base sheet 25 is adsorbed by a vacuum chuck 56, and in turn is adsorbed by a vacuum chuck 59 of a rotary disc 57 to release the thin base plate from attraction of the chuck 56, and the thin base sheet 25 is turned over by rotating the rotary disc 57 in a 180° arc. Thereafter, the thin base sheet is adsorbed by a vacuum chuck 35 of a support member 33 to render attraction of the chuck 59 ineffective, and the cut surface of the thin base sheet 25 is ground through rotation of a grinding stone 43. The above motion is repeated through orderly movement of the slide 3 and the moving table 7, the thin base sheet 25 is formed, in order, and is contained in a cassette 60 for carry-out. This constitution simplifies a manufacturing process and enables improvement of quality.