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Patent Searching and Data


Title:
METHOD AND DEVICE FOR MEASURING FORM PARAMETER OF CONICAL SHAPE
Document Type and Number:
Japanese Patent JPH0875443
Kind Code:
A
Abstract:

PURPOSE: To find form parameters of a cone stably and in a short period by calculating at least the parallel moving amount or rotating movement amount of a theoretical form so that error between the theoretical form and form data becomes smaller.

CONSTITUTION: An initial theoretical form is obtained from known form types and measured data, or a theoretical form data is input from a CAD, etc. Also, a parallel moving amount, rotating amount, etc., are obtained from the theoretical form data and measuring data and, according to them, the theoretical form is moved and rotated. Next, the parallel moving amount, rotating amount, etc., obtained are compared with preset numerical values for judgment. If a correct solution is not obtained, it must be done repeatedly. Then, after the parallel movement and rotation component have been calculated and theoretical form has been moved, a calculation is made in that state so as to obtain the apex angle and summit of a cone. In addition, the summit position of the theoretical form is moved and, at the same time, the apex angle is changed so that the apex angle of the cone can also be obtained at the same time.


Inventors:
SASAKI TOYOHARU
ISHIKAWA FUMIO
ITO IZUMI
OKAMOTO HIDEAKI
Application Number:
JP21304094A
Publication Date:
March 22, 1996
Filing Date:
September 06, 1994
Export Citation:
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Assignee:
NIKON CORP
International Classes:
G01B21/00; G01B21/20; G06T7/60; (IPC1-7): G01B21/00; G01B21/20; G06T7/60