PURPOSE: To measure accurately and rapidly the strain of a surface to be measured by irradiating the surface to be measured with light beams and by detecting the deviation of a reflected beam from a reference position.
CONSTITUTION: A frame body 5 stood upright on a horizontally movable base 4 in parallel to the surface of glass sample 1 is provided with photodetectors 7 and five light sources 6, such as lasers, which emit parallel light beams at constant intervals vertically. In this case, the angle θ contained in between a light beam L1 from one light source 6 and its reflected beam L2 when the L1 reflected by the surface of the sample 1 and the L2 enters photodetector 7 should be about 0.7°. It is detected by a float glass plate of 12mm thickness having less strain, and from the position of a photodetector 7 having detected the peak quantity of light and that of another photodetector 7 having detected the peak quantity of light on the sample surface 1, the strain of the surface 1 to be measured is calculated. Thus, the strain of the surface 1 to be measured is measured accurately and rapidly.
| JPS61280506 | APPARATUS FOR DETECTING POSITION |
| JP4222934 | Coordinate detector |
| JP2009293972 | APPARATUS, METHOD, AND PROGRAM FOR IMAGE MEASUREMENT |
HIYOUDOU MASATO
ATAKA KOUICHI
