Title:
METHOD AND DEVICE FOR PROCESSING MEASURED VALUE IN GAS FRICTION VACUUM GAUGE
Document Type and Number:
Japanese Patent JPS60168032
Kind Code:
A
Abstract:
A method for the processing of values measured in a gas friction vacuum meter, in which the pressure is determined by the drag on a magnetically suspended free ball, by forming a first time value tn-1 by measuring the time required for N/2 periods of revolution of the ball, and a second time value tn by the immediately following measurement of the time required for another N/2 periods of revolution of the ball, determining a pressure value by comparing the two times values, repeating this pressure value determination of two time values after each period of rotation for the same number N of periods of revolution of the ball to a total of z determinations, and displaying the average of the pressure value determined Z times. To be able to determine the pressure with optimum measurement times and uncertainties of measurement, the ratio of N to Z is selected at approximately 4:1.
Inventors:
ROTAARU SHIYUMITSUTO
Application Number:
JP26467484A
Publication Date:
August 31, 1985
Filing Date:
December 17, 1984
Export Citation:
Assignee:
LEYBOLD HERAEUS GMBH & CO KG
International Classes:
G01L21/16; G01L21/24; (IPC1-7): G01L21/16
Attorney, Agent or Firm:
Toshio Yano