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Patent Searching and Data


Title:
METHOD AND DEVICE FOR PROCESSING WAFER BY CHAMFERING MACHINE
Document Type and Number:
Japanese Patent JP2006173353
Kind Code:
A
Abstract:

To provide a processing method and a processing device in a chamfering machine which can stably supply a highly precise wafer by stabilizing a chamfering shape of the outer peripheral part of the wafer and reducing occurrence of fine chipping in a chamfering part.

In the processing method, change of grinding resistance in grinding for chamfering is detected by change of the power amount of a grinding stone rotary motor 4, and grinding velocity, that is, the number of rotations of a wafer rotary motor 3 is controlled on the basis of detected change of the power amount of the grinding stone rotary motor 4. The processing device has a chamfering machine for grinding and processing the outer periphery of the rotating wafer 1 by a rotating grinding stone 2, a motor power amount detector 5 for detecting change of power amount of the grinding stone rotary motor 4 which rotates the grinding stone in grinding, and a control device 6 which controls the number of rotations of the motor 3 rotating the wafer 1 based on change of the power amount of the grinding stone rotary motor 4 detected by the motor power amount detector 5 and changes grinding speed.


Inventors:
WATANABE NOBUFUMI
IKEDA TAKESHI
Application Number:
JP2004363604A
Publication Date:
June 29, 2006
Filing Date:
December 15, 2004
Export Citation:
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Assignee:
HITACHI CABLE
International Classes:
H01L21/304; B24B9/00; B24B17/10; B24B49/16
Attorney, Agent or Firm:
Toru Yui