Title:
METHOD AND DEVICE FOR PRODUCING DIAMOND FILM
Document Type and Number:
Japanese Patent JPH03295897
Kind Code:
A
Abstract:
PURPOSE:To use a less dangerous fuel by irradiating a substrate with an energy beam through the inner flame of a carbon combustion flame in contact with the substrate surface. CONSTITUTION:A substrate 11 fixed to a substrate cooling and holding means 3 is cooled and kept at several ten to 200 Torr, O2 is supplied from a gaseous O2 supply means 22 and a gaseous fuel from a gaseous fuel supply means 23 to a carbon combustion flame generating means 2 and burned to form the outer flame 13 and inner flame 12 of the carbon combustion flame, and the inner flame 12 is brought into contact with the substrate 11. A high-frequency power generated from a high-frequency power source 41 is then impressed on a high-frequency coil 43 through a matching box 42, a magnetic field generated from a magnetic field impressing means 5 is impressed on the inner flame 12 to vibrate the charged particle in the inner flame 12 and to elevate the temp. of the inner flame 12, and a diamond film is formed on the substrate 11.
Inventors:
KURIHARA KAZUAKI
Application Number:
JP9623190A
Publication Date:
December 26, 1991
Filing Date:
April 13, 1990
Export Citation:
Assignee:
FUJITSU LTD
International Classes:
C30B29/04; (IPC1-7): C30B29/04
Domestic Patent References:
| JPH03247592A | 1991-11-05 |
Attorney, Agent or Firm:
Seiichi Samukawa
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