Title:
METHOD AND DEVICE FOR PRODUCTION OF MICRO STRUCTURE
Document Type and Number:
Japanese Patent JP3804293
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a method and device for producing a micro structure having a high yield and a high image resolution in the laminating direction.
SOLUTION: While rotating a substrate holder 30 and a transfer table 40, the joining face of plural thin films 12a on a substrate 10 and the transfer table 40 is irradiated with an argon high speed atom beam 5, plural thin films 12a are peeled from the substrate 10, plural thin films 12a are laminated/joined on the transfer table 40, a micro structure is formed.
Inventors:
Mutsuya Takahashi
Takayuki Yamada
Takayuki Yamada
Application Number:
JP28076598A
Publication Date:
August 02, 2006
Filing Date:
October 02, 1998
Export Citation:
Assignee:
Fuji Xerox Co., Ltd
International Classes:
C23C26/00; C23C28/00; B62D57/00; B81C3/00; (IPC1-7): C23C28/00; C23C26/00; //B62D57/00
Domestic Patent References:
JP10092702A | ||||
JP7011436A |
Attorney, Agent or Firm:
Tadao Hirata
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