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Title:
METHOD AND DEVICE FOR PURIFYING CROSS-GRAIN GROOVE OF SURFACE TABLE
Document Type and Number:
Japanese Patent JP2005177902
Kind Code:
A
Abstract:

To positively eliminate sludge accumulated in cross-grain grooves of a surface table using a linear member.

A purifying device 10 for purifying the cross-grain grooves of the surface table 1 has a purifying tool 11 and a guide 12. The purifying tool 11 is formed by stretching a plurality of linear members 15 having roughened surfaces and flexibility, in parallel between a pair of holders 14, and constituted to eliminate sludge by fitting the respective linear members 15 into the cross-grain grooves 2 and reciprocating them in a length direction. The guide 12 has a head 23 comprising a plurality of guide grooves 25 into which the linear members 15 are slidably fitted, and a shaft 24 for gripping. The guide 12 is constituted to hold down part of the linear members 15 to hold the linear members 15 in the state of being fitted into the cross-grain grooves 2.


Inventors:
MIHASHI SHINICHI
Application Number:
JP2003419957A
Publication Date:
July 07, 2005
Filing Date:
December 17, 2003
Export Citation:
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Assignee:
SPEEDFAM CO LTD
International Classes:
B24B55/06; B24B37/04; H01L21/304; (IPC1-7): B24B55/06; B24B37/04; H01L21/304
Attorney, Agent or Firm:
Hiroshi Hayashi
Masahiko Goto
Hayashi Naoki