PURPOSE: To provide picture recognizing technique capable of simply and accurately recognizing patterns mixed in an objective original picture in a superposed state.
CONSTITUTION: This picture recognizing device is provided with a light source 2 for generating illuminating light 2a, an optical system 3, a camera 4 for inputting reflected/dispersed light 2b from a semiconductor wafer 1 and obtaining an original picture, a monitor 5, and a recognizing device 6. The device 6 is constituted of a picture segmenting part 7 for decomposing an original picture obtained from the camera 4 in accordance with a contrast difference and segmenting plural separated pictures 12a, 12b, plural picture memories 8 for individually storing respective separated pictures 12a, 12b, a picture synthesizing part 9 for synthesizing the pictures 12a, 12b stored in the memories 8 as a single synthetic picture, a pattern dictionary 10 storing reference patterns for plural character pictures, and a recognizing part 11 for executing character recognizing operation by collating the single synthetic picture with the reference patterns stored in the dictionary 10.
AOKI AKIYOSHI
YOKOYAMA YOSHITO
TAKAHASHI TATSUYA
HITACHI TOKYO ELECTRONICS
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