Title:
ID IDENTIFYING DEVICE FOR SEMICONDUCTOR MANUFACTURING DEVICE
Document Type and Number:
Japanese Patent JP3216205
Kind Code:
B2
Abstract:
PURPOSE: To provide a module to be attached to a cassette or container, which has no projections interfering with automatic cleaning, can undergo data updating without removal from the container, can be transported integrally with the container, and can store a large amount of data.
CONSTITUTION: IC modules 30A and 30B, each having a transmitter-receiver and a programmable memory, are provided on members 10 and 15 of a wafer container that is transported from one stage to another in a semiconductor manufacturing system. A stationary radio station 20 is provided for bidirectional communication with the IC modules. The IC modules are powered by the energy derived from the received radio waves.
Inventors:
Teppei Yamashita
Masanao Murata
Miki Tanaka
Hiya Morita
Kawano et al.
Atsushi Okuno
Masanori Tsuda
Mitsuhiro Hayashi
Masanao Murata
Miki Tanaka
Hiya Morita
Kawano et al.
Atsushi Okuno
Masanori Tsuda
Mitsuhiro Hayashi
Application Number:
JP7137892A
Publication Date:
October 09, 2001
Filing Date:
March 27, 1992
Export Citation:
Assignee:
Shinko Electric Co., Ltd.
International Classes:
G06K17/00; G06K19/10; H01L21/02; (IPC1-7): H01L21/02; G06K17/00; G06K19/10
Attorney, Agent or Firm:
Yoshiyuki Kaji (1 person outside)