METHOD AND DEVICE FOR SHAPE AND DIMENSION MEASUREMENT

Japanese Patent JPH04105010

A

PURPOSE:To provide accurate measurability for the pattern shape dimension of the specimen surface by irradiating specimen with an electron beam, sensing secondary electrons emitted, determining the inclination angle of the specimen surface, and calculating and displaying the section shape. CONSTITUTION:An electron beam generated by an electron gun 11 when a low acceleration voltage is impressed, is passed through a deflector 14 and a lens system 13 and cast onto a pattern to be measured on a specimen wafer 12 placed on a specimen table 15, and there scanning is made. Signals from a secondary electron sensor 16 (16a, 16b) are added and averaged by a signal processing circuit 21 according to the set number of deflection scanning passes. An inclination angle converter 22 determines the inclination angle of projections and recesses on the surface of specimen from these signals added and averaged by the circuit 21, while a shape calculating device 23 determines the z-coordinates of the depth in the scanning direction (x) from the correlationship before and after the inclination angle. At a shape dimension measuring device 24, on the other hand, the x-coordinate of the deflection signal given by a deflection control circuit 25 and the z-coordinate determined by the shape calculating device 23 are fed to a display device, where the section shape of the specimen surface is displayed figuratively, and the shape dimensions are measured.

JPH0610246

[Name of invention] Rotating device for rod material to be inspected

KATO KEIZO
MATSUOKA GENYA
NAKAYAMA YOSHINORI
HORIGOME SHINKICHI
FURUYA HISAHIRO

JP22250990A

April 07, 1992

August 27, 1990

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HITACHI LTD
HITACHI MAXELL

G01B15/00; H01J37/244; H01J37/28; (IPC1-7): G01B15/00; H01J37/244; H01J37/28

Junnosuke Nakamura (1 outside)

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