PURPOSE: To amplify a signal corresponding to unevenness information without deflection and allow the clear image display by removing a low frequency component after correcting the inclination every scanning line.
CONSTITUTION: In an adding machine 3, correction signals for correcting X-axial and Y-axial inclinations made in a X-axial correction signal generating part and a Y-axial correction signal generating part are added to an image signal, and the signal corrected in inclination is outputted. A low frequency component by temperature drift is removed from the inclination corrected signal by a bypass filter 6. The signal corresponding to outward scanning part of image signals having only high frequency components corresponding to individual uneven information is stored in a frame memory 7 and displayed as the unevenness information on a display 8. Thus, the low frequency component can be removed without deflecting the signal, and the inclination of a sample and the inclination of the signal resulting from temperature drift are corrected to display the signal as a clear image.
HOSAKA SUMIO
HOSOKI SHIGEYUKI
