Title:
METHOD AND DEVICE FOR SPUTTERING SUPERCONDUCTING THIN FILM OF NIOBIUM ON QUARTER-WAVE RESONANT CAVITY MADE OF COPPER FOR HEAVY ION ACCELERATION
Document Type and Number:
Japanese Patent JP2004003032
Kind Code:
A
Abstract:
To provide a method and a device for applying the lining of niobium on a quarter-wave cavity made of copper at low cost to optimize a capacity of the cavity in a radio frequency.
In the method for providing the thin film for applying the lining on the quarter-wave cavity made of the copper, a superconducting material, particularly niobium, is vapor-deposited on both cylindrical surface of the cavity and a flat plate shaped bottom in the shape of a fine powder layer having almost a constant thickness by a biased diode DC sputtering through an emission electrode having a shape suitable to the shape of the surface to be applied with the lining.
Inventors:
PALMIERI VINCENZO
PRECISO RENATO
RUZINOV VLADIMIR L
PRECISO RENATO
RUZINOV VLADIMIR L
Application Number:
JP2003166309A
Publication Date:
January 08, 2004
Filing Date:
June 11, 2003
Export Citation:
Assignee:
IST NAZI DI FISICA NUCLEARE
International Classes:
C23C14/16; C23C14/34; C23C14/38; H01L39/24; H05H7/20; (IPC1-7): C23C14/34; C23C14/16
Attorney, Agent or Firm:
Riku Ichikawa
Makoto Ichikawa
Makoto Ichikawa