Title:
METHOD AND DEVICE FOR SUPPLYING CHEMICALS
Document Type and Number:
Japanese Patent JPH1162838
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a method and a device for supplying chemicals, by which the constant amount of chemicals to be used can be supplied by specified pressure. SOLUTION: A reciprocating pump for supplying the specified IPA to be stored in a measuring tank 4 to a processing part such as a steam generator is formed of a diaphragm pump 41 to be driven by introduction of pulse-like pressurized gas to be generated per unit hour, a pressure switch 42 for detecting pressure is arranged on the discharging side of the diaphragm pump 41, and the pressure waveforms of IPA to be discharged from the diaphragm pump 41 are monitored on the basis of the detected signal from the pressure switch 42. Moreover, the detected signal from the pressure switch 42 is transmitted to a CPU 43, and pressure of pulse-like pressurized gas for driving the diaphragm pump 41 is controlled on the basis of a control signal from the CPU 43.
Inventors:
KOMINO MITSUAKI
Application Number:
JP23025997A
Publication Date:
March 05, 1999
Filing Date:
August 12, 1997
Export Citation:
Assignee:
TOKYO ELECTRON LTD
International Classes:
G01F11/36; F04B15/00; F04B23/02; F04B43/02; F04B43/067; F15B21/12; G05B23/02; H01L21/304; (IPC1-7): F04B43/02; F04B15/00; F04B43/067; F15B21/12; G01F11/36; G05B23/02
Attorney, Agent or Firm:
Kikuhiko Nakamoto