Title:
METHOD OF AND DEVICE FOR TRANSFERRING WAFER
Document Type and Number:
Japanese Patent JPS5585038
Kind Code:
A
Abstract:
PURPOSE:To eliminate an inconvenience of damaging a wafer due to shock and insertion of a plurality of wafers into one bridge at its transferring time by transferring the wafer to a vacant case without rotation using a rotation preventive plate. CONSTITUTION:A case carrying fully wafers 3 is set at the full case inserting case 4 of a transfer unit, and a vacant case to insert the wafers 3 newly is inserted into a vacant case inserting case 5. Then, a rotation preventive plate 7 is raised by a lever 6, rotated at 180 deg. around a supporting shaft 9 as a fulcrum toward the full case side by a vacant case handle lever 8, coated with a vacant case through the plate 7, and clamped by a hook 10. After it is inverted upside down by a full case side handle lever 11, the plate 7 is lowered by the lever 6 to thereby transfer the wafer 3. Finally, the case 4 is inverted at 180 deg. to the original position.
Inventors:
KATAGIRI SATORU
MIYAZAKI KAZUHIKO
MIYAZAKI KAZUHIKO
Application Number:
JP15742078A
Publication Date:
June 26, 1980
Filing Date:
December 22, 1978
Export Citation:
Assignee:
HITACHI LTD
HITACHI ELECTR ENG
HITACHI ELECTR ENG
International Classes:
H01L21/677; H01L21/02; H01L21/30; H01L21/68; (IPC1-7): H01L21/02; H01L21/30; H01L21/68