METHOD AND DEVICE FOR TRANSPORTING SUBSTRATE
Document Type and Number:
Japanese Patent JP2533706
PURPOSE: To provide the substrate transporting method which does not require the time for substrate transportation and does not require larger and complex devices, i.e., allows the transportation with one unit of transporting robot and the device thereof.
CONSTITUTION: In this method for transporting the substrate, the untreated substrate 5 is imposed on an arm 4 in a treating chamber and is allowed to stand by during the treatment of the substrate. This arm 4 in the state of carrying the untreated substrate 5 is moved after the completion of the treatment of the above-mentioned substrate 6. The treated substrate 6 is received in the position of the arm 5 separate from the position where the untreated substrate 5 is imposed during the course of this movement. In succession, the arm 5 is moved. The untreated substrate 6 is removed from the arm 5 when this material comes to the prescribed position within the treating chamber. The arm 5 carrying the treated substrate 6 is thereafter moved to the outside of the treating chamber.
June 27, 1996
September 13, 1991
C23C14/32; C23C14/48; C23C14/56; (IPC1-7): C23C14/56; C23C14/48