Title:
METHOD AND DEVICE FOR TREATING NF3-CONTAINING EXHAUST GAS
Document Type and Number:
Japanese Patent JP3877980
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a method and a device for decomposing and removing NF3, by which a large amount of NF3 is effectively decomposed and removed with a low running cost while suppressing the occurrence of harmful byproducts.
SOLUTION: The method for treating an exhaust gas containing NF3 is characterized in that NF3 is decomposed into nitrogen and fluorides by bringing the exhaust gas into contact with aqueous ammonia in a state that they are heated. The device for treating an exhaust gas containing NF3 is constituted of a heating/oxidizing tank having a hollow inner part through which the exhaust gas can pass, an exhaust gas introducing port and an aqueous ammonia introducing port, and a heating member for heating the internal atmosphere of the heating/oxidizing tank.
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Inventors:
Yoichi Mori
Application Number:
JP2001192613A
Publication Date:
February 07, 2007
Filing Date:
June 26, 2001
Export Citation:
Assignee:
Ebara Corporation
International Classes:
B01D53/68; B01D53/34; (IPC1-7): B01D53/68; B01D53/34
Domestic Patent References:
| JP9085045A | ||||
| JP2001145819A |
Attorney, Agent or Firm:
Kazuo Shamoto
Tadahiko Kurita
Shurin Sakurai
Kiyoshi Murakami
Shinya Hosokawa
Takako Koiso
Tadahiko Kurita
Shurin Sakurai
Kiyoshi Murakami
Shinya Hosokawa
Takako Koiso
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