METHOD OF DISCHARGING LIQUID BY RAPIDLY AND PRECISELY CONTROLLING AND DEVICE THEREFOR

Japanese Patent JP3590300

B2

PROBLEM TO BE SOLVED: To easily control the shape of the starting part and the end part of a stripe by previously applying pressure to a liquid before starting discharge to make discharge flow rate of the liquid from a discharge port constant and/or controlling the pressure in the discharge port adjacent part after finishing the discharge to a previously set specific value.
SOLUTION: In the quantitative discharge of the liquid, for example, a motor 6 is operated by a control means 19 based on the detected pressure of pressure sensors 18a, 18b to descend or ascend a plunger 10 in a syringe 3 to previously apply the pressure to the liquid before starting the discharge to fix the discharge flow rate of the liquid from the discharge port 13. Further, a flow passage condition before starting the discharge is controlled to be usually constant by controlling the pressure in the flow passage, particularly in the discharge port 13 adjacent part to the previously set fixed value. As a result, even in the case of using a highly viscous liquid or applying at a high speed, the shape of the starting part and the end part of the stripe is easily controlled and the uniform and regular stripe shape is formed.

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WO/2004/024619	METHOD FOR PROCESSING SUBSTRATE

Kazumasa Ikushima

JP15400099A

November 17, 2004

June 01, 1999

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Musashi Engineering Co., Ltd.

B05D1/26; B05C5/00; B05C11/10; B05D3/00; (IPC1-7): B05C5/00; B05C11/10; B05D1/26; B05D3/00

JP10277457A
JP8039763A
JP5168996A
JP63299191A
JP3342841B2
JP3398757B2
JP63002619Y1

Akinobu Sudo
Fumio Fuji
Asako Sudo

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