Title:
METHOD FOR DISPENSING FLUID
Document Type and Number:
Japanese Patent JP3958926
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a method and a system for dispensing a precise amount of fluid utilizing a rolling membrane pumping system.
SOLUTION: The method includes a process where the amount of changed dispense is calculated based on a membrane flex which is at least partially predicted if a particular dispense is other than a first dispense. Further, following steps are included: the predicted membrane flex is at least partially based on a maximum pump chamber pressure during the first dispense, the amount of dispense change is calculated based at least on the membrane shape if the particular dispense is the first one, the piston of the pumping system is operated at least partially based on the calculated amount, the outlet valve of the pumping system is opened, the pump chamber pressure is monitored to detect an abrupt drop of the pump chamber pressure, the mechanical failure in the pumping system is reported with signal, and the maximum pressure of the pump chamber is measured during the movement of the piston.
Inventors:
Raymond Thi Saberd
John Sea Vines
John Sea Vines
Application Number:
JP2000318343A
Publication Date:
August 15, 2007
Filing Date:
October 18, 2000
Export Citation:
Assignee:
INTEGRATED DESIGNS,L.P.
International Classes:
B67D7/14; F04B43/02; F04B7/02; F04B13/00; F04B43/04; H01L21/02; H01L21/31; (IPC1-7): H01L21/31; F04B43/02; //B67D5/14
Domestic Patent References:
| JP9053566A | ||||
| JP3048356B2 | ||||
| JP9256959A | ||||
| JP6058246A | ||||
| JP60093190A |
Attorney, Agent or Firm:
Michiteru Soga
Michiharu Soga
Hidetoshi Furukawa
Suzuki Kenchi
Michiharu Soga
Hidetoshi Furukawa
Suzuki Kenchi