Title:
METHOD FOR ELIMINATING ILLUMINATION IRREGULARITY
Document Type and Number:
Japanese Patent JPS5360626
Kind Code:
A
Abstract:
PURPOSE: To eliminate illumination irregularity in an illumination method for photoresist exposure simply by arranging as filter between light source and object a product obtained by subjecting a photosensitive agent to exposure followed by developing.
Inventors:
OSADA MIKIO
KAWAMURA NOBUKI
KAWAMURA NOBUKI
Application Number:
JP13527976A
Publication Date:
May 31, 1978
Filing Date:
November 12, 1976
Export Citation:
Assignee:
FUJITSU LTD
International Classes:
G03B27/54; G02B5/22; G02B27/00; G03B27/32; H01L21/00; (IPC1-7): G02B27/00; G03B27/32; H01L21/00
Domestic Patent References:
| JPS493651A | 1974-01-12 |
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