METHOD OF EQUALIZING DEGREE OF GRINDING OF DISC GRINDING

Title:

METHOD OF EQUALIZING DEGREE OF GRINDING OF DISC GRINDING

Document Type and Number:

Japanese Patent JPS54120490

Kind Code:

A

Abstract:

In conventional polishing machines, uneven transmission of pressure causes different degrees of abrasion of the polished discs which results in different thicknesses over one disc and also with respect to other discs in one polishing batch. This problem is solved according to the invention by the provision of soft elastic inserts between the pressure piston and the back of the carrier plate on which the discs to be polished are cemented.

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JPS59110537	CHAMFERING METHOD OF BRITTLE MATERIAL

Inventors:

HANSU KUREEMAA
HERUMUUTO KIRUSHIYUNERU

Application Number:

JP16028078A

Publication Date:

September 19, 1979

Filing Date:

December 27, 1978

Export Citation:

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Assignee:

WACKER CHEMITRONIC

International Classes:

B24B1/00; B24B37/04; H01L21/302; (IPC1-7): B24D9/08

Domestic Patent References:

JP51162399B
JPS4814234A

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